vertical lpcvd
低溫LPCVDSiGe;100至1200°C以上退火制程.LPCVD服務的市場:.MEMS·先進封裝·功率半導體·光電·半導體.AVP/RVP.TheAVP/RVPverticalbatchfurnace ...,ThisthesisanalyzestheflowandthermalfieldinaverticalLPCVDchamberwithrotatingsusceptorbyusingDSMCmethod.Itaimsat...
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Thislarge-batch,diffusion,LPCVD,verticalfurnaceperforms4-to8-inchwaferultra-high-temperaturetreatment.Thesystemcanbeflexiblyconfiguredto ...
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